detailed description:

KSA BandiT is a non-contact, real-time measurement tool for semiconductor substrate surfacestemperatureThe testing system uses semiconductor materials to absorb changes in edge temperature and measure the temperature of the chip/substrate in real time; andKSA BandiT has been successfully installed on numerous MBEs, Real time temperature detection of chips has been achieved on semiconductor deposition equipment such as MOCVD, Sputter, PLD, etc.

The kSA BandiT multi chip temperature monitoring software combines automatic servo motor control with scanning and detection functions, thereby achieving real-time mapping and detection of multi substrate temperatures during MBE epitaxial film growth process.

This system provides real-time two-dimensional temperature information of the substrate/chip during the epitaxial thin film growth process. Real time, non-contact, non-invasive direct detection of wafer (and film) surface temperature; The principle of temperature and semiconductor material's absorption edge (spectral band energy) correlation, which is the intrinsic property of the material, is adopted to make the measurement results more accurate; Can be loaded onto MBE MOCVD、 Real time temperature detection is performed on sputtering, evaporation systems, and heat treatment and annealing equipment.
KSA BandiT Data Download

Technical parameters:
Temperature range: Room temperature~1300 degrees Celsius;
Temperature repeatability: 0.2 degrees Celsius;
Temperature resolution: 0.1 degrees Celsius;
Stability:+/-0.2 degrees Celsius;

Main features:
*Real time, non-contact, non-invasive, direct wafer temperature monitoring;
*Multi substrate/chip surface 2D temperature mapping monitoring;
*The most authentic temperature monitoring of wafer surface or film;
*Integrated the latest blackbody radiation monitoring technology;
*Analysis of sedimentation rate and film thickness;
*Surface roughness analysis function;
*The measurement wavelength range is optional (e.g. visible light band, near-infrared band, etc.)
*Avoiding the impact of emissivity changes on measurements;
*No need for sedimentation equipment, Viewport special coating;

Application example: